内容标题36

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                产品信息

                无尘自动化

                产品信息

                半导体制造工厂使用的搬送系统

                OHT(空中单轨▆无人驾驶搬运系统)

                半导体制造工厂使用的搬送系统

                OHT(空中走¤行式无人搬送车)

                一种自动化搬送▼装置,能○够在空中轨道上行驶,并能够通过皮带传动起〗重机构“直接”进入保管设备或工艺设备的装卸口ㄨ。 “OHT”是Overhead Hoist Transport的简称。这一系统被广◎泛认定为300mm FAB及下一代FAB的主力搬送系统,目前不仅应用于工序区内部运输,也应用于工序区间或工厂间运输。

                OHTOHT
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